Method for producing a microfabricated atomic vapor cell
AssigneeCSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Developpment
InventorsThomas Overstolz, Jacques Haesler, Vladislav Spassov
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Abstract
The present invention relates to a method for producing a microfabricated atomic vapor cell, including a step of forming at least one cavity in a substrate and closing the cavity at one side. The method further includes: —a step of depositing a solution including an alkali metal azide dissolved in at least one of its solvents, —a step of evaporating such solvent for forming a recrystallized alkali metal azide, —a step of decomposing the recrystallized alkali metal azide in an alkali metal and nitrogen, such alkali metal depositing in the cavity of the substrate.
Claims13
Method for producing a microfabricated atomic vapor cell, comprising a step of forming at least one cavity in a substrate, said substrate being a silicon wafer, and closing the cavity at one side by bonding a glass wafer onto said side, wherein it further comprises:
- a step of depositing a solution comprising a rubidium metal azide dissolved in at least one solvent selected from the group consisting of deionized water and alcohols,
- a step of evaporating the solvents to form a recrystallized rubidium metal azide,
- a step of decomposing said recrystallized rubidium metal azide into rubidium metal and nitrogen, such rubidium metal depositing in the cavity of the substrate.
Dependencies are inferred from the claim text.