Liquid immersion scanning exposure system using an immersion liquid confined within a lens hood

A method for operating a liquid immersion scanning system, the method comprising:

• providing a watertight lens hood;
• providing a solid optical element as a base of the watertight lens hood;
• placing, a lens assembly within the watertight lens hood;
• providing a photoresist layer;
• disposing the solid optical element of the watertight lens hood above a top surface of the photoresist layer, wherein the solid optical element is in direct contact with the top surface of the photoresist layer or is in direct contact with a buffer layer in direct contact with the top surface of the photoresist layer;
• and
• operating the lens assembly within the watertight lens hood.

A method for operating a liquid immersion scanning system, the method comprising:

• providing a watertight lens hood having as bottom portion and a plurality of wall portions defining an interior volume, the bottom portion including a solid optical element positioned above a top surface of a photoresist material, wherein the solid optical element is in direct contact with top surface of the photoresist material or is in direct contact with a buffer layer in direct contact with the top surface of the photoresist material;
• placing an immersion liquid within the watertight lens hood;
• placing a lens assembly within the immersion liquid within the watertight lens hood;
• and
• operating the liquid immersion scanning system by moving, the lens assembly laterally within the immersion liquid within the watertight lens hood.