Scan head and scan arm using the same
AssigneeAdvanced Ion Beam Technology, Inc.
InventorRichard F. McRay
Life of this patent
Estimating the term…
Abstract
A scan head assembled to a scan arm for an ion implanter and a scan arm using the same are provided, wherein the scan head is capable of micro tilting a work piece and comprises a case, a shaft assembly, an electrostatic chuck, a first driving mechanism and a micro-tilt mechanism. The shaft assembly passes through a first side of the case and has a twist axis. The electrostatic chuck is fastened on a first end of the shaft assembly outside the case for holding the work piece. The first driving mechanism is disposed within the case and capable of driving the shaft assembly and the ESC to rotate about the twist axis. The micro-tilt mechanism is disposed within the case and capable of driving the shaft assembly and the ESC to tilt relative to the case.
Claims31
A scan head, assembled to a scan arm for an ion implanter, and capable of micro tilting a work piece, comprising:
- a case;
- a shaft assembly, passing through a first side of the case and having a twist axis;
- an electrostatic chuck, fastened on a first end of the shaft assembly outside the case for holding the work piece;
- a first driving mechanism, disposed within the case and capable of driving the shaft assembly and the ESC to rotate about the twist axis;
- and
- a micro-tilt mechanism, disposed within the case and capable of driving the shaft assembly and the ESC to tilt relative to the case.
A scan arm for an ion implanter comprising:
- a scan head, capable of micro tilting a work piece and comprising:
- a case;
- a shaft assembly, passing through a first side of the case and having a twist axis;
- an electrostatic chuck, fastened on a first end of the shaft assembly outside the case for holding the work piece;
- a first driving mechanism, disposed within the case and capable of driving the shaft assembly and the ESC to rotate about the twist axis;
- and
- a micro-tilt mechanism, disposed within the case and capable of driving the shaft assembly and the ESC to tilt relative to the case;
- a swing arm;
- a second driving mechanism, connected between the scan head and the swing arm and capable of driving the scan head to rotate about a tilt axis perpendicular to the twist axis;
- a horizontal arm;
- and
- a third driving mechanism, connected between the swing arm and the horizontal arm and capable of driving the swing arm to swing about a horizontal axis.
Dependencies are inferred from the claim text.