Process for forming schottky rectifier with PtNi silicide schottky barrier
AssigneeSiliconix Technology C. V.
InventorsRossano Carta, Carmelo Sanfilippo
Life of this patent
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Abstract
A process for forming a Schottky barrier to silicon to a barrier height selected at a value between 640 meV and 840 meV employs the deposition of a platinum or nickel film atop the silicon surface followed by the deposition of the other of a platinum or nickel film atop the first film. The two films are then exposed to anneal steps at suitable temperatures to cause their interdiffusion and an ultimate formation of Ni2Si and Pt2Si contacts to the silicon surface. The final silicide has a barrier height between that of the Pt and Ni, and will depend on the initial thicknesses of the Pt and Ni films and annealing temperature and time. Oxygen is injected into the system to form an SiO2 passivation layer to improve the self aligned process.
Claims9
A process of forming a Pt/Ni Schottky barrier, comprising the steps of:
- depositing one of a Pt or Ni film of given thickness atop a silicon wafer surface;
- then depositing the other of a Pt or Ni film of given thickness atop the first deposited film;
- thereafter annealing said films to cause the inter diffusion of Pt and Ni, and the growth of areas of nickel and platinum silicides at the silicon surface to define a Schottky junction barrier in the range of 640 meV to 840 meV;
- forming a SiO2 passivation layer atop said silicide after said annealing;
- and
- removing said SiO2 passivation layer to expose the top surface of said silicide and thereafter applying a layer of TiW atop said silicide.
A process of forming a Schottky barrier to the surface of a silicon wafer comprising the steps of:
- depositing a first barrier forming metal of thickness between 500 angstroms to 5000 angstroms atop said surface of said silicon wafer;
- depositing a second barrier forming metal of thickness between 100 angstroms to 5000 angstroms atop said first barrier forming metal;
- thereafter annealing said first and second metals to cause their interdiffusion and the growth of areas of silicides of said first and second metals on said silicon surface to define a Schottky junction barrier of a height dependent on the initial thicknesses chosen for said first and second metals and their thermal treatment;
- forming a SiO2 passivation layer atop said silicide after said annealing;
- and
- removing said SiO2 passivation layer to expose the top surface of said silicide and thereafter applying a layer of TiW atop said silicide.
Dependencies are inferred from the claim text.