Method for manufacturing a semiconductor device
AssigneeSpansion LLC
InventorsFumihiko Inoue, Yukio Hayakawa
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Abstract
A method of manufacturing a semiconductor device includes forming a silicon nitride film having an opening portion on a semiconductor substrate, forming a silicon oxide film on the silicon nitride film and on a side face of the opening portion, performing an etching treatment to the silicon oxide film so that a sidewall is formed on the side face of the opening portion, forming a trench on the semiconductor substrate with use of the sidewall and the silicon nitride film as a mask, and forming an insulating layer in the trench. The step of forming the silicon oxide film includes oxidizing the silicon nitride film with a plasma oxidation method or a radical oxidation method.
Claims8
A method for manufacturing a semiconductor device comprising:
- forming a silicon nitride film on a semiconductor substrate, the silicon nitride film having an opening formed in a portion thereof;
- forming a silicon oxide film on the silicon nitride film and on a side face of the opening;
- etching the silicon oxide film so that a sidewall is formed on the side face of the opening;
- forming a trench with vertical and straight sidewalls in the semiconductor substrate using the sidewall and the silicon nitride film as a mask;
- and
- forming an insulating layer in the trench that comprises a planar curve-less top portion that is parallel with the bottom of the trench, wherein the width of the planar curve-less top portion is less than the width between the vertical and straight sidewalls of the trench that is situated between convex curved portions that extend above and directly contact the semiconductor substrate beyond the left and right sides of the trench,
- wherein the step of forming the silicon oxide film includes the step of oxidizing the silicon nitride film with one of a plasma oxidation method or a radical oxidation method wherein at least a portion of the silicon oxide film forms a permanent part of the semiconductor device.
A method for manufacturing a semiconductor device comprising:
- forming a silicon nitride film and a first silicon oxide film on a semiconductor substrate, the silicon nitride film and the first silicon oxide film having an opening formed in a portion thereof wherein at least a portion of the first silicon oxide film forms a permanent part of the semiconductor device;
- forming a second silicon oxide film on an upper face of the first silicon oxide film and on a side face of the opening wherein the forming the second silicon oxide film comprises oxidizing the silicon nitride film with one of a plasma oxidation method or a radical oxidation method;
- etching the second silicon oxide film so that the first silicon oxide film on the silicon nitride film is left and forming a sidewall on the side face of the opening;
- forming a trench with vertical and straight sidewalls in the semiconductor substrate using the sidewall and the silicon nitride film as a mask;
- and
- forming an insulating layer in the trench that comprises a planar curve-less top portion that is parallel to the bottom of the trench, wherein the width of the planar curve-less top portion is less than the width between the vertical and straight sidewalls of the trench and that is situated between convex curved portions that extend above and directly contact the semiconductor substrate beyond the left and right sides of the trench.
Dependencies are inferred from the claim text.