Method of fabricating MEMS, NEMS, photonic, micro- and nano-fabricated devices and systems
AssigneeCorporation for National Research Initiatives
InventorMichael A. Huff
Life of this patent
Estimating the term…
Abstract
An improved method for the fabrication of Micro-Electro-Mechanical Systems (MEMS), Nano-Electro-Mechanical Systems (NEMS), Photonics, Nanotechnology, 3-Dimensional Integration, Micro- and Nano-Fabricated Devices and Systems for both rapid prototyping development and manufacturing is disclosed. The method includes providing a plurality of different standardized and repeatable process modules usable in fabricating the devices and systems, defining a process sequence for fabricating a predefined one of the devices or systems, and identifying a series of the process modules that are usable in performing the defined process sequence and thus in fabricating the predefined device or system.
Claims53
A method of fabricating Micro-Electro-Mechanical Systems (MEMS), Nano-Electro-Mechanical Systems (NEMS), Photonics, Nanotechnology, 3-Dimensional Integration, Micro- and Nano-Fabricated Devices and Systems, the method comprising:
- providing a plurality of different standardized and repeatable process modules that are usable in fabricating a plurality of different types of said devices and systems,
- defining a process sequence for fabricating a predefined one of said devices or systems,
- identifying a plurality of the different process modules that are usable in performing at least a portion of the defined process sequence for fabricating the predefined device or system,
- defining an ordered sequence for performing the identified plurality of the usable process modules, and
- performing the identified usable sequence of process modules to perform at least a portion of the defined process sequence,
- wherein the step of providing a plurality of different standardized and repeatable process modules usable in fabricating said devices and systems comprises the further step of identifying patterns in processing data collected from a plurality of actual process sequences used to fabricate said devices or systems and using those identifiable patterns to design appropriate process modules having utility for process sequences for the fabrication of a plurality of devices and systems.
A method of fabricating Micro-Electro-Mechanical Systems (MEMS), Nano-Electro-Mechanical Systems (NEMS), Photonics, Nanotechnology, 3-Dimensional Integration, Micro- and Nano-Fabricated Devices and Systems, the method comprising:
- providing a plurality of different standardized and repeatable process modules usable in fabricating a plurality of different types of said devices and systems, each process module being comprised of a plurality of processing steps,
- the standardized and repeatable process modules including at least one process module for micromachining different types of wafer surfaces, at least one process module for making through wafer vias, and at least one process module for bulk micromachining of substrates,
- defining a process sequence for fabricating a predefined one of said devices or systems,
- identifying a plurality of the different process modules that are usable in performing at least a portion of the defined process sequence for fabricating the predefined device or system,
- defining an ordered sequence for performing the identified plurality of the usable process modules, and
- performing the identified sequence of usable process modules to perform the portion of the defined process sequence,
- wherein the step of providing a plurality of different standardized and repeatable process modules usable in fabricating said devices and systems comprises the further step of identifying patterns in processing data collected from a plurality of actual process sequences used to fabricate said devices or systems and using those identifiable patterns to design appropriate process modules having utility for process sequences for the fabrication of a plurality of devices and systems.
A method of fabricating Micro-Electro-Mechanical Systems (MEMS), Nano-Electro-Mechanical Systems (NEMS), Photonics, Nanotechnology, 3-Dimensional Integration, Micro- and Nano-Fabricated Devices and Systems, the method comprising:
- providing a plurality of different standardized and repeatable process modules usable in fabricating a plurality of different types of said devices and systems, each process module being comprised of a plurality of processing steps which vary according to the complexity of the process module,
- the standardized and repeatable process modules including at least one process module for micromachining different types of wafer surfaces, at least one process module for making through wafer vias, and at least one process module for bulk micromachining of substrates,
- defining a process sequence for fabricating a predefined one of said devices or systems,
- identifying a plurality of the different process modules that are usable in performing at least a portion of the defined process sequence for fabricating the predefined device or system,
- defining an ordered sequence for performing the identified plurality of the usable process modules,
- performing the identified sequence of usable process modules to perform the portion of the defined process sequence, and
- if necessary, performing additional process steps required to complete the defined process sequence,
- wherein the step of providing a plurality of different standardized and repeatable process, modules usable in fabricating said devices and systems comprises the further step of identifying patterns in processing data collected from a plurality of actual process sequences used to fabricate said devices or systems and using those identifiable patterns to design appropriate process modules having utility for process sequences for the fabrication of a plurality of devices and systems.
A method of fabricating Micro-Electro-Mechanical Systems (MEMS), Nano-Electro-Mechanical Systems (NEMS), Photonics, Nanotechnology, 3-Dimensional Integration, Micro- and Nano-Fabricated Devices and Systems, the method comprising:
- providing a plurality of different standardized and repeatable process modules usable in fabricating a plurality of different types of said devices and systems, each process module being comprised of a plurality of processing steps,
- the standardized and repeatable process modules including at least one process module for surface micromachining different types of structural and sacrificial layers,
- defining a process sequence for fabricating a predefined one of said devices or systems,
- identifying a plurality of the different process modules that are usable in performing at least a portion of the defined process sequence for fabricating the predefined device or system,
- defining an ordered sequence for performing the identified plurality of the usable process modules, and
- performing the identified sequence of usable process modules to perform the portion of the defined process sequence,
- wherein the step of providing a plurality of different standardized and repeatable process modules usable in fabricating said devices and systems comprises the further step of identifying patterns in processing data collected from a plurality of actual process sequences used to fabricate said devices or systems and using those identifiable patterns to design appropriate process modules having utility for process sequences for the fabrication of a plurality of devices and systems.
A method of fabricating Micro-Electro-Mechanical Systems (MEMS), Nano-Electro-Mechanical Systems (NEMS), Photonics, Nanotechnology, 3-Dimensional Integration, Micro- and Nano-Fabricated Devices and Systems, the method comprising:
- providing a plurality of different standardized and repeatable process modules usable in fabricating a plurality of different types of said devices and systems, each process module being comprised of a plurality of processing steps,
- the standardized and repeatable process modules including at least one process module for surface micromachining different types of structural and sacrificial layers and at least one process module for bulk micromachining of substrates,
- defining a process sequence for fabricating a predefined one of said devices or systems,
- identifying a plurality of the different process modules that are usable in performing at least a portion of the defined process sequence for fabricating the predefined device or system,
- defining an ordered sequence for performing the identified plurality of the usable process modules, and
- performing the identified sequence of usable process modules to perform the portion of the defined process sequence,
- wherein the step of providing a plurality of different standardized and repeatable process modules usable in fabricating said devices and systems comprises the further step of identifying patterns in processing data collected from a plurality of actual process sequences used to fabricate said devices or systems and using those identifiable patterns to design appropriate process modules having utility for process sequences for the fabrication of a plurality of devices and systems.
Dependencies are inferred from the claim text.