Container storage add-on for bare workpiece stocker
AssigneesDynamic Micro System, Semiconductor Equipment GmbH
InventorLutz Rebstock
Life of this patent
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Abstract
The present invention relates to apparatuses and methods to store and transfer objects, and more particularly to workpiece stocker configurations such as stocker for semiconductor wafers, reticles or carrier boxes.
Claims21
A buffer storage add-on for a workpiece stocker, comprising
- a storage chamber comprising a plurality of storage compartments for storing a plurality of containers, the storage compartments arranged in an x-y array with transport pathways between the storage compartments,
- wherein the storage chamber comprises a first outside side, wherein the first outside side is configured to be coupled to a second outside side of the workpiece stocker, wherein the second outside side of the workpiece stocker is different than a front side of the workpiece stocker,
- wherein the x-y array defines an x-y plane,
- wherein the storage compartments have at least one side facing a transport pathway of the transport pathways,
- wherein the transport pathways are sufficiently large to accommodate movements of a container of the plurality of containers,
- wherein the transport pathways are connected to enable the container to travel to any storage compartment of the plurality of storage compartments;
- an x-y mechanism coupled to the storage chamber;
- a robot arm comprising an end handle for supporting the container, the robot arm comprising an extension mechanism for extending the end handle in a z-direction, wherein the z-direction is a direction not in the x-y plane, wherein the end handle is configured to be extended beyond the first outside side, passing the second outside side to an inside of the workpiece stocker,
- wherein the robot arm is extended for picking or for placing the container at a station of the workpiece stocker,
- wherein the robot arm is coupled to the x-y mechanism to move the container along the transport pathways, to a storage compartment of the plurality of storage compartments.
A container storage add-on for a bare workpiece stocker, the bare workpiece stocker accepting containers having workpieces stored therein at a loading station, and storing the bare workpieces to a bare workpiece storage chamber, wherein the loading station is at a front side of the bare workpiece stocker, wherein the loading station is configured to be manually accessed by an operator, the container storage add-on comprising
- a container storage chamber comprising a plurality of container storage compartments for storing a plurality of said containers, the container storage compartments arranged in an x-y array with transport pathways between the container storage compartments,
- wherein the container storage chamber comprises a first outside side, wherein the first outside side is configured to be coupled to a second outside side of the bare workpiece stocker, wherein the second outside side of the bare workpiece stocker is different than the front side,
- wherein the x-y array defines an x-y plane,
- wherein the container storage compartments have at least one side facing a transport pathway of the transport pathways,
- wherein the transport pathways are sufficiently large to accommodate movements of a container of the plurality of containers,
- wherein the transport pathways are connected to enable the container to travel to any container storage compartment of the container storage compartments;
- an x-y mechanism coupled to the container storage chamber;
- a robot arm comprising an end handle for supporting the container, the robot arm comprising an extending mechanism for extending the end handle in a z-direction, wherein the z-direction is a direction not in the x-y plane, wherein the end handle is configured to be extended beyond the first outside side, passing the second outside side to an inside of the bare workpiece stocker,
- wherein the robot arm is extended for picking or for placing the container at a station of the bare workpiece stocker,
- wherein the robot arm is coupled to the x-y mechanism to move the container supported at the end handle along the transport pathways to a container storage compartment of the container storage compartments,
- wherein the container storage add-on enables storage of empty containers after the workpieces stored therein have been transferred to be stored in the bare workpiece stocker, and
- wherein the container storage add-on enables supplying of empty containers to the loading station to hold bare workpieces retrieved from the bare workpiece stocker.
A bare workpiece stocker comprising
- a bare workpiece storage for storing bare workpieces;
- a loading station for accepting a workpiece container having workpieces stored therein, wherein the loading station is at a front side of the bare workpiece stocker, wherein the loading station is configured to be manually accessed by an operator;
- a transfer mechanism interfacing the bare workpiece storage and the loading station, the transfer mechanism transferring workpieces between the bare workpiece storage and the workpiece container in the loading station;
- a container storage buffer interfacing with the loading station for supplying to or storing empty containers from the loading station,
- wherein the container storage buffer enables storage of empty containers after the workpieces stored therein have been transferred to be stored in the bare workpiece stocker, and
- wherein the container storage buffer enables supplying of empty containers to the loading station to hold bare workpieces retrieved from the bare workpiece stocker,
- wherein the container storage buffer comprises a first side, wherein the first side is coupled to a second side of the bare workpiece stocker, wherein the second side of the bare workpiece stocker is different than the front side of the bare workpiece stocker,
- wherein the container storage buffer comprises
- a container storage chamber comprising a plurality of container storage compartments, the plurality of container storage compartments arranged in an x-y array with transport pathways between the plurality of container storage compartments,
- wherein the x-y array defines an x-y plane,
- wherein the plurality of container storage compartments have at least one side facing a transport pathway of the transport pathways,
- wherein the transport pathways are sufficiently large to accommodate movements of the workpiece container,
- wherein the transport pathways are connected to enable the workpiece container to travel to any container storage compartment of the plurality of container storage compartments;
- an x-y mechanism coupled to the container storage chamber;
- a robot arm comprising an end handle for supporting the workpiece container, the robot arm comprising an extending mechanism for extending the end handle in a z-direction, wherein the z-direction is a direction not in the x-y plane, wherein the end handle is configured to be extended beyond the first side, passing the second side to an inside of the bare workpiece stocker,
- wherein the robot arm is extended for picking or for placing the workpiece container at the loading station,
- wherein the robot arm is coupled to the x-y mechanism to move the workpiece container supported at the end handle along the transport pathways to a container storage compartment of the plurality of storage compartments.
Dependencies are inferred from the claim text.