Injector for a vacuum evaporation source
AssigneeRiber
InventorsJean-Louis Guyaux, Franck Stemmelen, Olivier Grange
Life of this patent
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Abstract
An injector for a vacuum evaporation source includes an injection duct (1) having a longitudinal axis (11) and an inlet port (2) able to be connected to a vacuum evaporation source, and at least one nozzle (3) for diffusing a vaporized material, the nozzle (3) having a lateral face (4), and an upper face (5). The nozzle (3) includes a main channel (6) emerging outside the injection duct (1) and at least a lateral feeding channel (7) connecting the interior of the injection duct (1) to the main channel (6). The lateral feeding channel (7) has a lateral orifice (8) emerging inside the injection duct (1) through the lateral face (4) of the nozzle (3) for avoiding the clogging of the nozzle (3) by oxidized materials.
Claims12
Injector for a vacuum evaporation source comprising:
- an injection duct (1) having a longitudinal axis (11) and comprising an inlet port (2) to be connected to a vacuum evaporation source, and at least one nozzle (3) for diffusing a vaporized material, said nozzle (3) having a lateral face (4), and an upper face (5) with an upper opening (29),
- wherein said nozzle (3) comprises a main channel (6) emerging outside said injection duct (1) and at least one lateral feeding channel (7) connecting the interior of the injection duct (1) to the main channel (6), said lateral feeding channel (7) having a lateral orifice (8) emerging inside said injection duct (1) through the lateral face (4) of said nozzle (3) thereby avoiding clogging of the upper opening (29) of the main channel of the nozzle by oxidized materials staying on the upper opening (29) of the upper face of the nozzle.
An injector for a vacuum evaporation source, comprising:
- an injection duct (1) having a longitudinal axis (11) and comprising an inlet port (2) connectable to a vacuum evaporation source, and a nozzle (3) that diffuses a vaporized material,
- wherein said nozzle (3) has a lateral face (4) and an upper face (5),
- wherein said nozzle (3) comprises i) a main channel (6) emerging outside said injection duct (1) and ii) a lateral feeding channel (7) connecting an interior of said injection duct (1) to said main channel (6),
- wherein said lateral feeding channel (7) has a lateral orifice (8) emerging inside said injection duct (1) through the lateral face (4) of said nozzle (3), and
- wherein said main channel (6) comprises an upper portion (9) having an upper opening (29) emerging inside said injection duct (1) through the upper face (5) of said nozzle (3).
Dependencies are inferred from the claim text.