Substrate treatment system
AssigneeVon Ardenne Anlagentechnik GmbH
InventorHenrik Obst
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Abstract
A substrate treatment system for treating substrates includes a system chamber, delimited by chamber walls, at least one substrate treatment device and a transportation device inside the system chamber. The transportation device has an arrangement of transportation rollers arranged one behind the other in the transportation direction, for vertical or horizontal transportation of substrates. At least a first group of transportation rollers which are arranged immediately one behind the other, each has its own drive device.
Claims13
Substrate treatment system for treating substrates, comprising a system chamber delimited by chamber walls, at least one substrate treatment device, and a transportation device inside the system chamber, the transportation device having an arrangement of transportation rollers arranged one behind another in a transportation direction, for transportation of substrates, wherein the arrangement of transportation rollers is subdivided into at least three groups of transportation rollers, at least in a first group of the transportation rollers arranged immediately one behind another, which first group is disposed between two second groups of jointly actuated transportation rollers, each transportation roller has a respective drive device, and wherein drive devices of the first group of transportation rollers are arranged inside the system chamber.
The substrate treatment system for treating substrates, comprising a system chamber delimited by chamber walls, at least one substrate treatment device, and a transportation device inside the system chamber, the transportation device having an arrangement of transportation rollers arranged one behind another in a transportation direction, for transportation of substrates, wherein the arrangement of transportation rollers is subdivided into at least three groups of transportation rollers, at least in a first group of the transportation rollers arranged immediately one behind another, which first group is disposed between two second groups of jointly actuated transportation rollers, each transportation roller has a respective drive device, wherein a rotor of the drive device is arranged under pressure conditions prevailing in the system chamber and a stator of the drive device is arranged outside the pressure conditions prevailing in the system chamber.
Dependencies are inferred from the claim text.