Nanometer-scale sharpening of conductor tips
AssigneeThe Board of Trustees of the University of Illinois
InventorsJoseph W. Lyding, Scott W. Schmucker
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Abstract
The invention provides methods for sharpening the tip of an electrical conductor. The methods of the invention are capable of producing tips with an apex radius of curvature less than 2 nm. The methods of the invention are based on simultaneous direction of ionized atoms towards the apex of a previously sharpened conducting tip and application of an electric potential difference to the tip. The sign of the charge on the ions is the same as the sign of the electric potential. The methods of the invention can be used to sharpen metal wires, metal wires tipped with conductive coatings, multi-walled carbon nanotubes, semiconducting nanowires and semiconductors in other forms.
Claims22
A microscope probe comprising a microscope probe tip wherein the apex of the microscope probe tip has a radius of curvature less than 5 nm and the microscope probe tip has a cone angle from 60 degrees to 65 degrees and is not single crystal tungsten.
A field emitter comprising a field emission tip wherein the apex of the field emission tip has a radius of curvature less than 5 nm and the field emission tip has a cone angle from 60 degrees to 65 degrees and is not single crystal tungsten.
A stand-alone ion sputtering apparatus capable of sharpening a conductor having a tip with an initial radius of curvature less than one micrometer, the apparatus comprising:
- a. a vacuum chamber connected to a vacuum source;
- b. an ion flux source in communication with the vacuum chamber;
- c. a sample holder adapted to hold the conductor to be sharpened;
- and
- d. a source of electrical potential difference connected between the sample holder and the vacuum chamber.
A scanning probe microscope apparatus capable of in-situ sharpening of the probe tip, the apparatus comprising:
- a. a scanning probe microscope comprising a vacuum chamber and a probe comprising a tip, the tip apex having an initial radius of curvature less than 1 micron;
- the probe being located within the vacuum chamber;
- b. an ion beam source in communication with the vacuum chamber;
- and
- c. a source of electrical potential difference connected to establish a potential difference between the probe and the vacuum chamber,
- wherein the apparatus is adapted so that the probe can be moved within the vacuum chamber to substantially align the longitudinal axis of the tip with the longitudinal axis of the ion beam for sharpening.
An electron microscope apparatus capable of in-situ sharpening of the field emitter tip, the apparatus comprising:
- a. a electron microscope comprising a field emitter tip and a vacuum chamber connected to a vacuum source;
- b. an ion beam source in communication with the vacuum chamber;
- and
- c. a source of electrical potential difference connected to establish an electrical potential difference between the tip and the surrounding vacuum chamber,
- wherein the apparatus is adapted to allow rotation of the tip so that the longitudinal axis of the tip is substantially aligned with the longitudinal axis of the ion beam for sharpening.
Dependencies are inferred from the claim text.