Test element group and semiconductor device
AssigneeSony Corporation
InventorMasaaki Bairo
Life of this patent
Estimating the term…
Abstract
A device with a plurality of elements separated into groups, each element including an activation terminal, an input terminal and an output terminal, a plurality of first signal lines, and a plurality of second signal lines, where the input terminals of each element in each group are commonly connected to one of the plurality of first signal lines, the input terminals of the different groups are connected to different first signal lines, and the output terminals of the each element in each group are independently connected to a different one of the plurality of second signal lines.
Claims20
A device comprising:
- a plurality of elements separated into groups, each element including an activation terminal, an input terminal and an output terminal;
- first signal lines;
- second signal lines;
- and
- third signal lines,
- wherein,
- for each group, the input terminals of each element are commonly connected to one of the first signal lines,
- for each group, the each activation terminal is independently connected to one of the third signal lines, and
- for each group, each output terminal is independently connected to one of the second signal lines or one of the first signal lines to which the input terminal of elements of a different group are connected.
A method of testing a plurality of elements of device arranged into groups with each element including an activation terminal, an input terminal and an output terminal, the device also including first signal lines, second signal lines and third signal lines, wherein, for each group, the input terminals of each element are commonly connected to one of the first signal lines, for each group, the each activation terminal is independently connected to one of the third signal lines, and for each group, each output terminal is independently connected to one of the second signal lines or one of the first signal lines to which the input terminal of elements of a different group are connected, the method comprising:
- activating one of the plurality of elements by sending an activation signal to the activation terminal of the element;
- sending an input signal to the input terminal of the activated element by the first signal line;
- and
- measuring a characteristic of the activated element by evaluating an output signal output by the activated element.
A device comprising:
- a plurality of elements, each element including an activation terminal, an input terminal and an output terminal;
- a first signal line;
- and
- second signal lines,
- wherein,
- the input terminals of each element are commonly connected to the first signal line, and
- the output terminal of each element is independently connected to a different one of the second signal lines.
A method of testing a plurality of elements of a device, each element including an activation terminal, an input terminal and an output terminal, the device also including a first signal line and a plurality of second signal lines, the input terminal of each element being commonly connected to the first signal line, and the output terminal of each element being independently connected to a different second signal line, the method comprising:
- activating one of the plurality of elements by sending an activation signal to the activation terminal of the element;
- sending an input signal to the input terminal of the activated element via the first signal line connected thereto;
- and
- measuring a characteristic of the activated element by evaluating an output signal output by the activated element on the second signal line connected to the activated element.
Dependencies are inferred from the claim text.