Method and apparatus for verifying stitching accuracy of stitched chips on a wafer
AssigneeBAE Systems Information and Electronic Systems Integration Inc.
InventorsThomas J. McIntyre, Charles N. Alcorn, Matthew A. Gregory
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Abstract
A method for verifying stitching accuracy of a stitched chip on a wafer is disclosed. Initially, a set of test structures are inserted within a reticle layout. An exposure program is executed to control a photolithography equipment having a stepper to perform multiple exposures of the reticle on a wafer to generate a stitched chip on the wafer. Electrical measurements are then performed on the test structures at actual stitch boundaries of the stitched chip to evaluate stitching accuracy of the stitched chip.
Claims14
A method for verifying stitching accuracy of a stitched chip on a wafer, said method comprising:
- inserting a plurality of test structures pairs in a reticle layout,
- wherein said test structure pairs for evaluating stitching accuracy of a stitched chip in a X-direction include a set of J structures located on a first chip segment, each J structure having two conductive bars orthogonally connected by one conductive bar located at a boundary of said first chip segment, and a set of H structures located on a second chip segment, each H structure having two conductive bars orthogonally connected by one conductive bar located at various distances from a boundary of said second chip segment,
- wherein said test structure pairs for evaluating stitching accuracy of said stitched chip in a Y-direction include a first set of three conductive bars located on said first chip segment, each conductive bar being spaced a first distance from each other, a second set of three conductive bars located on said second chip segment, each conductive bar being spaced a second distance from each other, wherein said second distance is larger than said first distance;
- executing an exposure program to control a photolithography equipment having a stepper to perform multiple exposures of said reticle layout on a wafer to generate a stitched chip on said wafer;
- and
- performing electrical measurements on a set of stitched test structures produced using said test structures at actual stitch boundaries of said stitched chip to evaluate stitching accuracy of said stitched chip in said X-direction and said Y-direction.
A non-transitory computer-readable recording medium having a computer program product for verifying stitching accuracy of a stitched chip on a wafer, said non-transitory computer-readable recording medium comprising:
- program code for inserting a plurality of test structures pairs in a reticle layout,
- wherein said test structure pairs for evaluating stitching accuracy of a stitched chip in a X-direction include a set of J structures located on a first chip segment, each J structure having two conductive bars orthogonally connected by one conductive bar located at a boundary of said first chip segment, and a set of H structures located on a second chip segment, each H structure having two conductive bars orthogonally connected by one conductive bar located at various distances from a boundary of said second chip segment,
- wherein said test structure pairs for evaluating stitching accuracy of said stitched chip in a Y-direction include a first set of three conductive bars located on said first chip segment, each conductive bar being spaced a first distance from each other, a second set of three conductive bars located on said second chip segment, each conductive bar being spaced a second distance from each other, wherein said second distance is larger than said first distance;
- program code for executing an exposure program to control a photolithography equipment having a stepper to perform multiple exposures of said reticle layout on a wafer to generate a stitched chip on said wafer;
- and
- program code for performing electrical measurements on a set of stitched test structures produced using said test structures at actual stitch boundaries of said stitched chip to evaluate stitching accuracy of said stitched chip in said X-direction and said Y-direction.
Dependencies are inferred from the claim text.