Nanoimprint lithography processes for forming nanoparticles

A nanoimprint lithography method comprising:

• forming a patterned layer on a multilayer substrate, the multilayer substrate comprising a removable layer, wherein the removable layer comprises a water-soluble, non-toxic polymer with functional groups selected from the group consisting of carboxyl groups, nitrogen-containing groups, epoxide groups, hydroxyl groups, and polyethylene oxide groups;
• etching the patterned layer and portions of the multilayer substrate including the removable layer to transfer features from the patterned layer into the removable layer, wherein the etched removable layer comprises exposed protrusions and recessions;
• disposing a polymerizable material on the etched removable layer to fill the recessions and cover the protrusions of the etched removable layer;
• solidifying the polymerizable material to form pillars of the polymerized material in the recessions of the removable layer and to form a layer of polymerized material over the removable layer;
• removing a portion of the polymerized material to expose the protrusions of the etched removable layer;
• and
• releasing the pillars from the removable layer to form nanoparticles comprising the polymerized material.