Non-wear shutter apparatus for a vapor deposition apparatus
AssigneeFirst Solar, Inc.
InventorsChristopher Rathweg, Edwin Jackson Little
Life of this patent
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AssigneeFirst Solar, Inc.
InventorsChristopher Rathweg, Edwin Jackson Little
Estimating the term…
An apparatus and associated method for vapor deposition of a sublimated source material as a thin film on a photovoltaic (PV) module substrate includes a deposition head wherein a source material is sublimated. A distribution manifold is provided with a plurality of passages defined therethrough for passage of the sublimated source material to the substrate. A shutter plate is disposed above the distribution manifold and includes a plurality of passages therethrough that align with the passages in the distribution manifold in a first position of the shutter plate. The shutter plate is movable to a second position wherein the shutter plate blocks the passages in the distribution manifold to flow of sublimated material therethrough. A lifting mechanism is configured between the shutter plate and the distribution manifold to lift and move the shutter plate between the first and second positions without sliding the shutter plate on the distribution manifold.
An apparatus for vapor deposition of a sublimated source material as a thin film on a photovoltaic (PV) module substrate, said apparatus comprising:
Dependencies are inferred from the claim text.