Heated annulus chuck

A clamping device for selectively maintaining a position of a first workpiece and a second workpiece, the clamping device comprising:

• an electrostatic clamping plate annulus generally surrounding a central portion, wherein the electrostatic clamping plate annulus comprises a clamping surface and has a diameter associated with a diameter of the first workpiece, wherein the diameter of the first workpiece is larger than a diameter of the second workpiece, and wherein the electrostatic clamping plate annulus is configured to selectively electrostatically clamp a circumferential portion of the first workpiece to the clamping surface thereof;
• a non-electrostatic central portion comprising a heater, wherein the central portion has a diameter associated with the diameter of the second workpiece;
• and
• a workpiece carrier, wherein the workpiece carrier is configured to substantially hold the second workpiece, and wherein a diameter of the workpiece carrier is associated with the diameter of the electrostatic clamping plate annulus, and wherein the electrostatic clamping plate annulus is further configured to selectively clamp the workpiece carrier to the clamping surface thereof, therein selectively maintaining a position of the second workpiece with respect to the non-electrostatic central portion.