Exposure apparatus and device manufacturing method
AssigneesNikon Corporation, Nikon Engineering Co., Ltd.
InventorsHiroyuki Nagasaka, Takeshi Okuyama
Life of this patent
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Abstract
A liquid immersion exposure apparatus and method exposes a substrate. The apparatus includes a projection optical system having an optical element via which exposure light is projected through liquid and a member having a channel in which the liquid flows. The member has an opening through which the exposure light passes. A gap is formed between a first surface of the member and a second surface of at least one of the optical element and a holding component which holds the optical element, and at least a portion of one or both of the first surface and the second surface is liquid repellent.
Claims76
A liquid immersion exposure apparatus that exposes a substrate, the apparatus comprising:
- a projection optical system having an optical element via which exposure light is projected through liquid;
- and
- a member having a channel in which the liquid flows, the member having (i) an opening through which the exposure light passes, (ii) a recovery outlet from which the liquid is collected, and (iii) the channel including a recovery channel connected to the recovery outlet, wherein
- a gap is formed between a first surface of the member and a second surface of at least one of the optical element and a holding component which holds the optical element, and
- at least a portion of one or both of the first surface and the second surface is liquid repellent.
A liquid immersion exposure method that exposes a substrate, the method comprising:
- projecting exposure light through a liquid via an optical element of a projection optical system, the exposure light passing through an opening of a member, the member having a channel through which the liquid flows, the channel including a recovery channel connected to a recovery outlet of the member;
- and
- collecting the liquid by the recovery outlet of the member, wherein
- a gap is formed between a first surface of the member and a second surface of at least one of the optical element and a holding component which holds the optical element, and
- at least a portion of one or both of the first surface and the second surface is liquid repellent.
Dependencies are inferred from the claim text.