Method for controlling electrical property of passive device during fabrication of integrated component and related integrated component
AssigneeMediatek Inc.
InventorsMing-Da Tsai, George Chien, Cheng-Chou Hung
Life of this patent
Estimating the term…
Abstract
A method for controlling an electrical property of a passive device during a fabrication of an integrated component includes providing a substrate, manufacturing the passive device on the substrate, measuring the electrical property of the passive device to obtain a measuring result, determining at least one layout pattern corresponding to at least one later manufacturing process by the measuring result for adjusting the electrical property of the passive device, and continuing the rest of the fabrication including the at least one later manufacturing process of the integrated component.
Claims23
A method for controlling an electrical property of a passive device during a fabrication of an integrated component, comprising:
- providing a substrate;
- manufacturing the passive device on the substrate;
- measuring the electrical property of the passive device to obtain a measuring result;
- determining at least one layout pattern corresponding to at least one later manufacturing process by the measuring result for adjusting the electrical property of the passive device;
- and
- continuing the rest of the fabrication including the at least one later manufacturing process of the integrated component.
An integrated component, comprising:
- a semiconductor substrate;
- a passive device formed on the semiconductor substrate, the passive device comprising at least one first conductive element;
- and
- at least one sub-cell disposed adjacent to the passive device, the sub-cell is used for adjusting an electrical property of the passive device through at least one manufacturing process, the sub-cell comprising at least one first sub-cell conductive element, wherein the first sub-cell conductive element and the first conductive element of the passive device are formed with a same first conductive layer.
Dependencies are inferred from the claim text.