Back to results
US 8,787,525 B2Granted
X-ray monochromator, method of manufacturing the same and X-ray spectrometer
AssigneeCanon Kabushiki Kaisha
InventorsAtsushi Komoto, Hirokatsu Miyata, Wataru Kubo
Life of this patent
Estimating the term…
Abstract
An X-ray monochromator including: a substrate having a concave surface; and an inorganic oxide film formed on the concave surface and having a plurality of pores, in which the plurality of pores of the inorganic oxide film being laid periodically in a stacked manner in the normal directions of the concave surface, and in which the plurality of pores being cylindrical is provided. The X-ray monochromator shows an excellent X-ray spectroscopic performance.
Claims5
An X-ray monochromator comprising:
- a substrate having a curved surface with a radius of curvature twice that of a Rowland circle;
- and
- an inorganic oxide film formed on the curved surface and having a plurality of pores,
- wherein the plurality of pores are laid periodically in a stacked manner in the inorganic oxide film, and have a structural period in a direction normal to the curved surface,
- wherein the plurality of pores are spherical, and
- wherein a first symmetric reflection plane includes axes of rotation (n=6) for a plurality of pores in a first region of the inorganic oxide film and is disposed perpendicular to the surface of the inorganic oxide film, and
- wherein a second symmetric reflection plane includes axes of rotation (n=6) for a plurality of pores in a second region of the inorganic oxide film, is disposed perpendicular to the surface of the inorganic oxide film, and is not parallel to the first symmetric reflection plane.
4 more elements
An X-ray monochromator, comprising:
- a substrate having a curved surface;
- and
- an inorganic oxide film formed on the curved surface and having a plurality of cylindrical pores, each of the cylindrical pores extending parallel to the surface of the inorganic oxide film,
- wherein the plurality of pores are laid periodically in a stacked manner in the inorganic oxide film, and form a structure that is periodic along a direction normal to the curved surface, and
- wherein the radius of curvature of the curved surface is twice that of a Rowland circle.
2 more elements
Dependencies are inferred from the claim text.