US 8,786,933 B2 · Fabrication of a floating rocker MEMS device for light modulation

Abstract

The current disclosure shows how to make a fast switching array of mirrors for projection displays. Because the mirror does not have a via in the middle connecting to the underlying spring support, there is an improved contrast ratio that results from not having light scatter off the legs or vias like existing technologies. Because there are no supporting contacts, the mirror can be made smaller making smaller pixels that can be used to make higher density displays. In addition, because there is not restoring force from any supporting spring support, the mirror stays in place facing one or other direction due to adhesion. This means there is no need to use a voltage to hold the mirror in position. This means that less power is required to run the display.

Claims12

Dependent claims

A method of fabricating a MEMS device over a SRAM memory cell, comprising:

depositing a conductive layer over a first sacrificial layer and one or more conductive electrodes, wherein the one or more conductive electrodes are disposed above the SRAM memory cell;
depositing a second sacrificial layer over the conductive layer;
enclosing the first sacrificial layer, conductive layer and second sacrificial layer within a cavity, wherein the cavity is bound by a transparent layer or cap layer;
removing the second sacrificial layer and the first sacrificial layer to release the conductive layer within the cavity such that the conductive layer forms a discrete, floating rocker that rests on a fulcrum and pivots into and out of contact with the one or more conductive electrodes, wherein the discrete, floating rocker remains spaced from the transparent layer or cap layer during operation;
and
sealing the cavity.

3 more elements

Dependencies are inferred from the claim text.

Fabrication of a floating rocker MEMS device for light modulation

Life of this patent

Fabrication of a floating rocker MEMS device for light modulation

Life of this patent

Abstract

Claims12