Method for measuring an optical system

A non-transient computer-readable medium for operating a measuring system for an optical system, comprising:

• computer program instructions for processing items of information about a first plurality of test beams of radiation which pass through the optical system so as to impinge on exactly one first measurement region in a measurement plane, wherein the test beams of the first plurality of test beams pass through the optical system on optical paths that differ in pairs and impinge on the first measurement region at angles of incidence that differ in pairs with respect to the measurement plane,
• computer program instructions for processing items of information about a second plurality of test beams of radiation which pass through the optical system so as to impinge on exactly one second measurement region in the measurement plane, wherein the test beams of the second plurality of test beams pass through the optical system on optical paths that differ in pairs and impinge on the second measurement region at angles of incidence that differ in pairs with respect to the measurement plane, wherein the second measurement region differs from the first measurement region,
• computer program instructions for determining associated impingement regions on at least one reference surface of the optical system, wherein the associated impingement region for each test beam of the first plurality of test beams and of the second plurality of test beams on at least one reference surface of the optical system is determined using a database, and wherein the impingement region associated with a test beam is defined as the surface region of the at least one reference surface on which radiation of the respective test beam impinges,
• computer program instructions for reading in measurement values of a first measurement variable of the radiation impinging at the first measurement region,
• computer program instructions for reading in measurement values of a second measurement variable of the radiation impinging at the second measurement region,
• computer program instructions for determining and assigning an associated measurement value for each test beam of the first plurality of test beams,
• computer program instructions for determining and assigning an associated measurement value for each test beam of the second plurality of test beams, and
• computer program instructions for generating a spatial diagnosis distribution of the radiation intensity on at least one reference surface from the measurement values and the impingement regions for each test beam of the first plurality and of the second plurality of test beams.