Method and apparatus for measurement of exit pupil transmittance

A light conditioner comprising:

• a reticle having a reticle top surface and a reticle bottom surface;
• a lens and means for mounting the lens to the reticle;
• and
• an aperture plate and means for mounting the aperture plate to the reticle, wherein the lens is mounted below the reticle bottom surface and substantially focuses on the aperture plate, the aperture plate being attached to the reticle bottom surface.

A method of determining a reticle side telecentricity of a projection imaging system, the method comprising:

• providing an illumination source with a substantially uniform illumination with an angular extent that is greater than an angular size of an entrance pupil of the projection imaging system;
• exposing a recording media with illumination from the illumination source that is emitted from an exit pupil of the projection imaging system;
• reconstructing a transmission function of the projection imaging system as a function of field position from the exposed recording media;
• determining a difference between a center of a reference frame and a center of the exposed exit pupil for each of a plurality of field points in the exit pupil;
• and
• calculating individual components of reticle side telecentricity.

A light conditioner for a projection imaging system, the light conditioner comprising:

• an optical input;
• an optical output, wherein the light conditioner receives light at the optical input from a light source and outputs a substantially uniform illumination light with an angular extent that is greater than an angular size of an entrance pupil of the projection imaging system;
• a reticle having a reticle top surface and a reticle bottom surface;
• a lens and means for mounting the lens to the reticle;
• and
• an aperture plate and means for mounting the aperture plate to the reticle, wherein the lens is mounted above the reticle top surface and substantially focuses on the aperture plate, the aperture plate being attached to the reticle top surface.

A light conditioner for a projection imaging system, the light conditioner comprising:

• an optical input;
• an optical output, wherein the light conditioner receives light at the optical input from a light source and outputs a substantially uniform illumination light with an angular extent that is greater than an angular size of an entrance pupil of the projection imaging system;
• a reticle having a reticle top surface and a reticle bottom surface;
• a lens and means for mounting the lens to the reticle;
• and
• an aperture plate and means for mounting the aperture plate to the reticle, wherein the lens is mounted below the reticle bottom surface and substantially focuses on the aperture plate, the aperture plate being attached to the reticle bottom surface.