Phased array antenna module and method of making same

A phased array antenna comprising:

• a semiconductor wafer having a plurality of conductive vias therein;
• circuitry fabricated on a top side of said semiconductor wafer and coupled to said plurality of conductive vias;
• an array of antenna elements above the top side of said semiconductor wafer;
• a plurality of coaxial connections between said circuitry and said array of antenna elements, each comprising an outer conductor, an inner conductor, and a dielectric material therebetween;
• and
• a power combiner on a back side of said semiconductor wafer coupled to at least some of said plurality of conductive vias.

A method of making a phased array antenna comprising:

• fabricating circuitry on a top side of a semiconductor wafer;
• forming a coaxial coupling arrangement with the circuitry;
• and
• positioning an array of phased array antenna elements above the top side of the semiconductor wafer and coupled to the circuitry via the coaxial coupling arrangement.