Apparatus and method for near field scan calibration
AssigneeElectronics and Telecommunications Research Institute
InventorsSoon Il Yeo, Jae Kyung Wee, Pil Soo Lee
Life of this patent
Estimating the term…
Abstract
Disclosed are a method and an apparatus of near field scan calibration, and more particularly, a method and an apparatus for near field scan calibration for calibrating a characteristic of an antenna for near field scan measurement of a semiconductor chip. The apparatus for near field scan calibration includes: a plane-type text fixture having a plane shape; an antenna positioned spaced apart from the plane-type test fixture by a set spacing distance and acquiring data including a magnetic field; and a spectrum analyzer analyzing the data acquired by the antenna.
Claims12
An apparatus for near field scan calibration, comprising:
- a plane-type test fixture having a plane shape;
- an antenna spaced apart from the plane-type test fixture by a set spacing distance and acquiring data including a magnetic field;
- and
- a spectrum analyzer analyzing the data acquired by the antenna,
- wherein the plane-type test fixture has a circular shape.
A method for near field scan calibration, comprising:
- feeding power to a center of a plane-type test fixture;
- acquiring data including a magnetic field from an antenna for near field scan measurement spaced apart from the plane-type test fixture by a set spacing distance;
- and
- extracting a characteristic of the antenna by using the data,
- wherein the plane-type test fixture has a circular shape.
Dependencies are inferred from the claim text.