US 8,786,090 B2 · Al alloy film for display device, display device, and sputtering target

Abstract

The present invention provides an Al alloy film for a display device, to be directly connected to a conductive oxide film on a substrate, the Al alloy film comprising Ge in an amount of 0.05 to 0.5 at %, and comprising Gd and/or La in a total amount of 0.05 to 0.45 at %, a display device using the same, and a sputtering target for the display device. For the Al alloy film of the present invention, even when a barrier metal is not provided, and a conductive oxide film and the Al alloy film are directly connected, the adhesion between the conductive oxide film and the Al alloy film is high, and the contact resistivity is low, and preferably, the dry etching property is also excellent.

Claims26

Dependent claims

An Al alloy film, comprising:

Al,
Ge in an amount of 0.05 to 0.5 at %, and
Gd, La, or both in a total amount of 0.05 to 0.45 at %.

Dependencies are inferred from the claim text.

Facts

Application

12/312,907Filed 27 Nov 2007

Priority

JP 2006-32449430 Nov 2006

Published

US 2010/0065847 A118 Mar 2010

Granted

22 Jul 2014

Term ends

Not estimatedThe source records don’t support an estimate.

Classification8 codes

H10D 30/6739
Characterised by the electrode materials: conductor-insulator-semiconductor electrodes
H10D 30/6737
Characterised by the electrodes: characterised by the electrode materials
H10D 30/6743
Group IV materials, e.g. germanium or silicon carbide: silicon
H10D 86/441
Characterised by multiple TFTs: interconnections, e.g. scanning lines

Al alloy film for display device, display device, and sputtering target

Life of this patent

Al alloy film for display device, display device, and sputtering target

Life of this patent

Abstract

Claims26