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US 8,786,084 B2Granted
Semiconductor package and method of forming
AssigneeSTMicroelectronics (Grenoble 2) SAS
InventorsRomain Coffy, Jean-François Sauty
Life of this patent
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Abstract
A semiconductor package includes a semiconductor die attached to a support having electrically conductive paths, the semiconductor die having a bond-pad electrically connected to the electrically a conductive path on the support by a bond-wire of a first metallic composition, the bond-wire and the bond-pad being coated with a protection layer of a second metallic composition.
Claims11
A semiconductor package comprising:
- a semiconductor die attached to a support having electrically conductive paths, said semiconductor die having a bond-pad electrically connected to the electrically conductive path on said support by a bond-wire of 99% pure copper, wherein an end of said bond-wire forms a connection junction on a face of said bond-pad,
- wherein said bond-wire and said connection junction are coated with a protection layer of a metallic composition, the protective layer having a first layer, the first layer being titanium, and a second layer coating the first layer, the second layer being an alloy of nickel.
A process for manufacturing a semiconductor package, the process comprising:
- providing a plurality of supports arranged in a matrix on a larger support, each support having electrically conductive paths;
- providing a semiconductor die having bond-pads;
- then attaching said semiconductor die to one of said plurality of supports;
- then electrically connecting a bond-pad of the semiconductor die to an electrically conductive path by a bond-wire of an alloy of copper at 99% purity,
- wherein the electrically conductive paths of said plurality of supports are all electrically connected together and the process further comprises electroplating a layer of a second metallic composition onto the bond-wire and the connection junction;
- and
- wherein electroplating comprises electroplating a layer of titanium onto the bond-wire and the connection junction and then electroplating a layer of nickel onto the layer of titanium.
4 more elements
Dependencies are inferred from the claim text.