Solid-state thin-film capacitor

A solid-state thin-film capacitor device comprising:

• a semiconductor substrate having a first surface;
• a thin-film capacitor comprising a first electrode layer, a dielectric layer and a second electrode layer;
• the first electrode layer disposed upon the first surface and comprising a transition metal;
• the dielectric layer disposed upon the first electrode layer and comprising an oxide of a transition metal;
• the second electrode layer disposed upon the dielectric layer and comprising an oxide of a transition metal, wherein the dielectric layer is disposed between the first electrode layer and the second electrode layer;
• wherein the first electrode layer and the second electrode layer are in contact with the dielectric layer, and each layer presents an actual surface area at least two times greater than a surface area defined by an orthogonal length dimension and width dimension of the first surface of the semiconductor substrate;
• an electrical circuit element positioned within the semiconductor substrate and enclosed by the semiconductor substrate and the first electrode layer, whereby the thin-film capacitor extends from the first surface of the semiconductor substrate and the electrical circuit element is enclosed by the thin-film capacitor and the semiconductor substrate;
• and
• a hermetic sealing structure disposed about the thin-film capacitor and forming a hermetic seal of the thin-film capacitor in combination with the semiconductor substrate.