Nonvolatile semiconductor memory device and method for manufacturing the same
AssigneeKabushiki Kaisha Toshiba
InventorsMegumi Ishiduki, Masaru Kidoh, Mitsuru Sato, Masaru Kito, Ryota Katsumata
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AssigneeKabushiki Kaisha Toshiba
InventorsMegumi Ishiduki, Masaru Kidoh, Mitsuru Sato, Masaru Kito, Ryota Katsumata
Estimating the term…
According to one embodiment, a nonvolatile semiconductor memory device includes: a first stacked body; a memory film; a first channel body layer provided inside the memory film; an interlayer insulating film provided on the first stacked body; a second stacked body having a select gate electrode layer, and a second insulating layer; a gate insulating film provided on a side wall of a second hole communicating with the first hole and penetrating the second stacked body and the interlayer insulating film in a stacking direction of the second stacked body; and a second channel body layer provided inside the gate insulating film in the second hole. A first pore diameter of the second hole at an upper end of the select gate electrode layer is smaller than a second pore diameter of the second hole at an lower end of the select gate electrode layer.
A nonvolatile semiconductor memory device, comprising:
A nonvolatile semiconductor memory device, comprising:
Dependencies are inferred from the claim text.