Local crystallization by heat treatment
AssigneeSamsung Display Co., Ltd.
InventorsTae-Hyung Hwang, Hyun-Jae Kim, Doh-Kyung Kim, Tae-Hun Jung, Woong-Hee Jeong, Choong-Hee Lee
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AssigneeSamsung Display Co., Ltd.
InventorsTae-Hyung Hwang, Hyun-Jae Kim, Doh-Kyung Kim, Tae-Hun Jung, Woong-Hee Jeong, Choong-Hee Lee
Estimating the term…
Disclosed is a crystallization apparatus capable of locally crystallizing amorphous silicon. The crystallization apparatus includes a heat emission part, a support part and a roller. The heat emission part emits heat upon receiving a heat emission source. The support part supports the heat emission part and provides the heat emission source to the heat emission part. The roller receives the heat emission part and has at least one opening to provide heat to a target (e.g., amorphous silicon). Local crystallization is performed without causing damage to a substrate.
An apparatus comprising:
An apparatus comprising:
Dependencies are inferred from the claim text.