Target supply apparatus, chamber, and extreme ultraviolet light generation apparatus
AssigneeGigaphoton Inc.
InventorsHiroshi Umeda, Taku Yamazaki, Hakaru Mizoguchi, Toshihiro Nishisaka
Life of this patent
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Abstract
A target supply apparatus mounted in a chamber in which extreme ultraviolet light is generated by introducing a target material and a laser beam into the chamber may include a target generator having a nozzle, a first pipe configured to cover the nozzle, a cover opening provided in the first pipe to allow the target material to pass through the first pipe, and a first valve configured to open and close the cover opening.
Claims11
A target supply apparatus mounted in a chamber in which extreme ultraviolet light is generated by introducing a target material and a laser beam into the chamber, the apparatus comprising:
- a target generator including a nozzle;
- a cover configured to cover the nozzle;
- a cover opening provided in the cover to allow the target material to pass through the cover;
- and
- a cover opening/closing section configured to open and close the cover opening.
A target supply apparatus mounted in a chamber in which extreme ultraviolet light is generated by introducing a target material and a laser beam into the chamber, the apparatus comprising:
- a target generator including a nozzle;
- and
- a nozzle hole opening/closing portion configured to open and close a nozzle hole in the nozzle.
A chamber comprising:
- a chamber main body including a chamber opening;
- a target supply apparatus configured to introduce a target material into the chamber main body through the chamber opening;
- and
- a chamber opening/closing section configured to open and close the chamber opening.
An extreme ultraviolet light generation apparatus that generates extreme ultraviolet light by introducing a target material and a laser beam, the apparatus comprising:
- a target generator including a nozzle;
- a chamber main body including a chamber opening through which the target material is introduced;
- a chamber opening/closing section configured to open and close the chamber opening;
- a cover configured to cover the nozzle;
- a cover opening provided in the cover to allow the target material to pass through the cover;
- and
- a cover opening/closing section configured to open and close the cover opening.
Dependencies are inferred from the claim text.