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AssigneeHitachi High-Technologies Corporation
InventorsEiko Nakazawa, Hiroyuki Kobayashi, Susumu Kuwabata
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Provided is means which enables observation of the shape of a specimen as it is without deforming the specimen. Observation is made by allowing a specimen-holding member having an opening (for example, microgrid and mesh) to hold an ionic liquid and charging a specimen thereto, to allow the specimen to suspend in the ionic liquid. Furthermore, in the proximity of the specimen-holding member, a mechanism of injecting an ionic liquid (ionic liquid introduction mechanism) and/or an electrode are provided. When a voltage is applied to the electrode, the specimen moves or deforms in the ionic liquid. How the specimen moves or deforms can be observed. Furthermore, in the proximity of specimen-holding member, an evaporation apparatus is provided to enable charge of the specimen into the ionic liquid while evaporating. Furthermore, in the proximity of the specimen-holding member, a microcapillary is provided to charge a liquid-state specimen into the ionic liquid. Note that the specimen-holding member is designed to be rotatable.
A transmission electron microscope in which an electron beam is applied to a specimen set in a specimen chamber and an image of the specimen is formed from the electron beam transmitted through the specimen, the transmission electron microscope comprising:
A method for observing a specimen in which an electron beam is applied to a specimen set in a specimen chamber and a specimen image formed from the electron beam transmitted through the specimen is observed, the method comprising:
Dependencies are inferred from the claim text.