Charged particle beam apparatus

A method of manufacturing a device, the method comprising:

• performing drawing on a substrate using a charged particle beam apparatus;
• developing the substrate on which the drawing has been performed;
• and
• processing the developed substrate to manufacture the device,
• wherein the charged particle beam apparatus includes:
• an irradiation device configured to emit a charged particle beam to irradiate the substrate with the charged particle beam;
• a measurement device configured to measure an irradiation position of the charged particle beam emitted by the irradiation device;
• and
• a controller configured to correct a measurement result obtained by the measurement device, based on correction information, and control the irradiation position of the charged particle beam on the substrate based on the corrected measurement result,
• wherein the measurement device includes:
• a plate including first and second knife edges, wherein at least a part of the charged particle beam incident on the measurement device is blocked by the plate, thereby the plate is deformed;
• and
• a sensor configured to detect another part of the charged particle beam incident on the measurement device, while the charged particle beam is scanned relative to the plate so that the charged particle beam traverses the first and second knife edges, and
• wherein the controller is configured to determine an interval between the first and second knife edges of the plate which has been deformed, based on a result detected by the sensor, and generate the correction information based on the determined interval.

An apparatus for measuring an irradiation position of a charged particle beam, the apparatus comprising:

• a plate including first and second knife edges, wherein at least a part of the charged particle beam incident on the apparatus is blocked by the plate, thereby the plate is deformed;
• and
• a sensor configured to detect another part of the charged particle beam incident on the apparatus, while the charged particle beam is scanned relative to the plate so that the charged particle beam traverses the first and second knife edges, and
• a computing unit configured to determine an interval between the first and second knife edges of the plate which has been deformed, based on a result detected by the sensor, generate correction information based on the determined interval, and correct the measured irradiation position of the charged particle beam based on the generated correction information.

An apparatus which performs drawing on a substrate with first and second charged particle beams, the apparatus comprising:

• an irradiation device configured to emit the first and second charged particle beams to irradiate the substrate with the first and second charged particle beams;
• a measurement device configured to measure irradiation positions of the first and second charged particle beams emitted by the irradiation device;
• and
• a controller configured to correct a measurement result obtained by the measurement device, based on correction information, and control the irradiation positions of the first and second charged particle beams on the substrate based on the corrected measurement result,
• wherein the measurement device includes:
• a plate including first, second and third knife edges, wherein at least a part of the first charged particle beam and at least a part of the second charge particle beam which are incident on the measurement device are blocked by the plate, thereby the plate is deformed;
• and
• a sensor configured to detect another part of the first charged particle beam incident on the measurement device, while the first charged particle beam is scanned relative to the plate so that the first charged particle beam traverses the first and second knife edges, and detect another part of the second charged particle beam incident on the measurement device, while the second charged particle beam is scanned relative to the plate so that the second charged particle beam traverses the second and third knife edges, and
• wherein the controller is configured to determine an interval between the first and third knife edges of the plate which has been deformed, based on a result detected by the sensor, and generate the correction information based on the determined interval.