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US 8,785,862 B2Granted
X-ray detector and medical X-ray device
AssigneeSiemens Aktiengesellschaft
InventorMichael Stark
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Abstract
An X-ray detector having an active array comprising pixel elements for detecting X-ray radiation is provided to enable high-quality X-ray imaging, wherein each pixel element has a scintillator layer for converting X-ray radiation into light and a photodiode produced by means of CMOS technology for converting light into a measurable electrical signal, and wherein the pixel elements are arranged on a silicon substrate and a BOX (buried oxide) layer is sandwiched between the silicon substrate and the photodiode.
Claims14
An X-ray detector comprising:
- an active array of pixel elements for detecting X-ray radiation,
- wherein each pixel element has a scintillator layer for converting X-ray radiation into light and a photodiode produced by means of CMOS technology for converting light into a measurable electrical signal, and
- wherein the pixel elements are arranged on a silicon substrate and a buried oxide layer is sandwiched between the silicon substrate and the photodiode, the buried oxide layer being sized and configured to prevent X-ray-induced charges generated in the substrate from diffusing to the photodiode.
A medical X-ray device, comprising:
- an X-ray source, and
- an X-ray detector comprising:
- an active array of pixel elements for detecting X-ray radiation,
- wherein each pixel element has a scintillator layer for converting X-ray radiation into light and a photodiode produced by means of CMOS technology for converting light into a measurable electrical signal, and
- wherein the pixel elements are arranged on a silicon substrate and a buried oxide layer is sandwiched between the silicon substrate and the photodiode, the buried oxide layer being sized and configured to prevent X-ray-induced charges generated in the substrate from diffusing to the photodiode.
2 more elements
Dependencies are inferred from the claim text.