Apparatus and method for producing solar cells
AssigneeTSMC Solar Ltd.
InventorsEdward Teng, Ying-Chen Chao, Chih-Jen Yang, Kuo-Jui Hsiao
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AssigneeTSMC Solar Ltd.
InventorsEdward Teng, Ying-Chen Chao, Chih-Jen Yang, Kuo-Jui Hsiao
Estimating the term…
A method and apparatus for forming a solar cell. The apparatus includes a housing defining a vacuum chamber and a rotatable substrate apparatus configured to hold a plurality of substrates on a plurality of surfaces wherein each of the plurality of surfaces are disposed facing an interior surface of the vacuum chamber. A first sputtering source is configured to deposit a plurality of absorber layer atoms of a first type over at least a portion of a surface of each one of the plurality of substrates. An evaporation source is disposed in a first subchamber of the vacuum chamber and configured to deposit a plurality of absorber layer atoms of a second type over at least a portion of the surface of each one of the plurality of substrates. A first isolation source is configured to isolate the evaporation source from the first sputtering source.
An apparatus for forming a solar cell, comprising:
A method of forming a solar cell, comprising:
An apparatus for forming a solar cell, comprising:
Dependencies are inferred from the claim text.