Substrate processing apparatus, substrate processing method, and program for implementing the method

A non-transitory computer-readable storage medium storing a program for causing a computer to execute a substrate processing method for a substrate processing apparatus including at least one process chamber in which predetermined processing is carried out on a substrate as an object to be processed, the substrate processing method comprising:

• a dummy processing step of carrying out dummy processing on a non-product substrate;
• and
• a determining step for determining whether or not the dummy processing is to be executed, wherein:
• said determining step includes a stability determining step of determining whether or not an interior of the process chamber is in a stable state;
• said dummy processing step includes a dummy processing omitting step of omitting the execution of the dummy processing when said stability determining step determines that the interior of the process chamber is in the stable state;
• a power applied in a main step, in which processing is carried out at the highest temperature, for the dummy processing to be carried out once is increased to a higher level than a power applied in a main step for the predetermined processing to be carried out on the substrate;
• when a standing time over which the process chamber is left standing and counting of which is started from a time count start reference time set to an execution end time of the predetermined processing has not exceeded a predetermined time period, it is determined in said stability determining step that the interior of the process chamber is in the stable state;
• and
• said predetermined time period is longer than a time interval between successive lot transfers, whereby constant execution of the dummy processing between successive lot transfers can be prevented.