Method for manufacturing micro-structure

A method for manufacturing a micro-structure comprising the stages of (i) processing a sacrificial film on a substrate to form a sacrificial film pattern, (ii) forming an inorganic material film on the sacrificial film pattern, (iii) providing a portion of the inorganic material film with an aperture for etching, and (iv) etching away the sacrificial film pattern through the aperture to define a space having the contour of the sacrificial film pattern, wherein

• the stage (i) of forming a sacrificial film pattern includes the steps of:
• (A) forming an optically patternable sacrificial film of 2 to 20 μm thick using a sacrificial film-forming composition comprising:
• (i) component (A-1), (A-2), or (A-3);
• and
• (ii) a crosslinker;
• wherein component (A-1) is (i) a cresol novolac resin having some or all phenolic hydroxyl groups esterified with 1,2-naphthoquinonediazidosulfonyl halide, or (ii) a mixture of a cresol novolac resin having some or all phenolic hydroxyl groups esterified with 1,2-naphthoquinonediazidosulfonyl halide and a cresol novolac resin having phenolic hydroxyl groups non-esterified,
• wherein component (A-2) is the novolac resin (i) or the novolac resin mixture (ii) of (A-1) and a 1,2-naphthoquinonediazidosulfonic acid ester,
• wherein component (A-3) is a cresol novolac resin having phenolic hydroxyl groups non-esterified and a 1,2-naphthoquinonediazidosulfonic acid ester,
• wherein the crosslinker is selected from the group consisting of melamines, alkoxymethylureas, and alkoxymethylglycolurils,
• (B) exposing patternwise the optically patternable sacrificial film to first high-energy radiation,
• (C) developing the sacrificial film with an alkaline developer to form a positive sacrificial film pattern, and
• (D) exposing the sacrificial film pattern to second high-energy radiation, and then heating the sacrificial film pattern at a temperature of 100 to 220° C., for thereby forming crosslinks within the cresol novolac resin in the sacrificial film pattern.