Automatic positioning and sensing microelectrode arrays

A method comprising:

• providing a microelectrode sensing device including
• forming a recording electrode in a first conductive layer, that at least partially conducts electricity, over a substrate;
• arranging a plurality of positioning electrodes in a second conductive layer, that at least partially conducts electricity, over the recording electrode to define a sensing region over the recording electrode and reduce capacitive or inductive interference;
• adding a passivation material at least between the first and second conductive layers arranged to electrically insulate the recording electrode from the positioning electrodes and retain one or more target cells in a solution;
• using the positioning electrodes to apply an electric field pattern that moves and confines the target cells to a sub-region of the sensing region that at least partially overlaps the recording electrode;
• and
• using the recording electrode to record electrical activities of the confined cells.

A microelectrode sensing device, comprising:

• a substrate;
• and
• an array of microelectrode sensors formed on the substrate, each sensor comprising:
• a first layer formed over the substrate and patterned to comprise a sensing electrode which measures electrical activities of one or more target cells in a solution above the first layer;
• a second layer elevated above the first layer and patterned to comprise a plurality of positioning electrodes arranged to define a sensing region on top of the sensing electrode in which the solution is located, the positioning electrodes operable to generate an electric field pattern in the sensing region to move and confine the target cells above the sensing electrode;
• and
• an insulator material filled between the first and the second layers to electrically insulate the sensing electrode from the positioning electrodes, the insulator material shaped to define at least one channel between the first and the second layers to contain the solution, wherein the sensing region is located in the channel.

A microelectrode sensing device, comprising:

• a substrate;
• and
• an array of microelectrode sensors formed on the substrate, each sensor comprising
• a first layer, that at least partially conducts electricity, formed above the substrate and patterned to comprise a recording electrode to measure electrical activities of one or more target cells in a solution;
• a second layer elevated above the first layer and patterned to comprise a plurality of positioning electrodes arranged to define a sensing region above the recording electrode in which the solution is located, the positioning electrodes operable to generate an electric field pattern in the sensing region to move and confine the target cells to a sub-region of the sensing region that at least partially overlaps the recording electrode;
• and
• an insulator material to electrically insulate the recording electrode from the positioning electrodes.