Method for forming a thin-film lithium-ion battery
AssigneeSTMicroelectronics (Tours) SAS
InventorPierre Bouillon
Life of this patent
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Abstract
A method for forming a lithium-ion type battery including the steps of forming, over an at least locally conductive substrate, an insulating layer having a through opening; successively and conformally depositing a stack comprising a cathode collector layer, a cathode layer, an electrolyte layer, and an anode layer, this stack having a thickness smaller than the thickness of the insulating layer; forming, over the structure, an anode collector layer filling the space remaining in the opening; and planarizing the structure to expose the upper surface of the insulating layer.
Claims31
A method for forming a battery comprising:
- forming, over a substrate, an insulating layer comprising an opening;
- successively and conformally depositing a stack onto the insulating layer and the opening, the stack comprising a cathode collector layer, a cathode layer, an electrolyte layer, and an anode layer, the stack having a thickness within the opening that is smaller than a thickness of the insulating layer;
- and
- forming, over the stack, an anode collector layer in the opening.
A method for forming a battery comprising:
- providing an insulating layer disposed on a substrate, wherein the insulating layer includes an opening;
- depositing a stack in the opening, wherein the stack comprises a first collector layer, a cathode layer, an electrolyte layer, and an anode layer, wherein the stack has a thickness within the opening that is smaller than a thickness of the insulating layer;
- and
- forming a second collector layer over the stack.
Dependencies are inferred from the claim text.