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US 8,783,838 B2Granted
Liquid ejecting head, liquid ejecting apparatus, and piezoelectric element
AssigneeSeiko Epson Corporation
InventorsTomohiro Sakai, Tsutomu Asakawa
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Abstract
A piezoelectric layer includes a buffer layer containing an oxide containing Bi and Co and disposed on an electrode, and a layer disposed on the buffer layer and containing a perovskite oxide containing Bi, Ba, Fe and Ti. A piezoelectric element includes the piezoelectric layer and the electrode. A liquid ejecting head includes a pressure generating chamber communicating with a nozzle aperture, and the piezoelectric element. A liquid ejecting apparatus includes the liquid ejecting head.
Claims9
A liquid ejecting head comprising:
- a pressure generating chamber communicating with a nozzle aperture;
- and
- a piezoelectric element including a piezoelectric layer and an electrode, the piezoelectric layer including a buffer layer containing an oxide containing Bi and Co and disposed on the electrode, and a layer disposed on the buffer layer and containing a perovskite oxide containing Bi, Ba, Fe and Ti,
- wherein the buffer layer includes at least one composition expressed by the following general formulas:
- BiCoO3 (1);
- (Bi,MA)CoO3 (2);
- Bi(Co,MB)O3 (3);
- (Bi,MA)(Co,MB)O3 (4);
- and
- MA in formulas (2) and (4) represents at least one metal element other than Bi, and MB in formulas (3) and (4) represents at least one metal element other than Co.
7 more elements
A piezoelectric element comprising:
- an electrode;
- and
- a piezoelectric layer disposed on the electrode, the piezoelectric layer including a buffer layer containing an oxide containing Bi and Co, and a layer disposed on the buffer layer and containing a perovskite oxide containing Bi, Ba, Fe and Ti,
- wherein the buffer layer includes at least one composition expressed by the following general formulas:
- BiCoO3 (1);
- (Bi,MA)CoO3 (2);
- Bi(Co,MB)O3 (3);
- (Bi,MA)(Co,MB)O3 (4);
- and
- MA in formulas (2) and (4) represents at least one metal element other than Bi, and MB in formulas (3) and (4) represents at least one metal element other than Co.
7 more elements
Dependencies are inferred from the claim text.