US 8,783,674 B2Granted

Stage

AssigneeUlvac, Inc.

InventorsYuya Inoue, Tamotsu Tanifuji, Hisato Tanaka, Makoto Takahashi, Kuniyoshi Sekine

Life of this patent

Estimating the term…

Loading patent…

Abstract

Provided is a substrate stage which can transfer a substrate at a high speed. In the substrate stage of the present invention, auxiliary mounting tables are attached to a main mounting table, and lower rails are arranged over on the main mounting table and above the auxiliary mounting tables. When both ends of the lower rails are bent upwardly by a vertically adjusting unit in order to prevent the both ends of the lower rails to be bent downwardly, the lower rails are made straight. Since the lower rail is not divided, the linearity is ensured and the moving plate does not stutter so that transfer of the substrate at high speed can be performed.

Claims7

Dependent claims

A stage, comprising:

a main mounting table;
an auxiliary mounting table which has an area smaller than an area of the main mounting table and can be separated from the main mounting table;
a plurality of lower rails which are arranged over on the main mounting table and above the auxiliary mounting table, end portions of the lower rail being positioned above the auxiliary mounting table;
and
a moving plate which is located above each of the lower rails and can be run above the lower rails,
wherein each one of the plurality of lower rails is formed from a single raw plate, the lower rails being detachably attached to the main mounting table and the auxiliary mounting table, and
wherein the auxiliary mounting tables are provided with a vertically adjusting unit which can adjust the height of the lower rails at plural positions,
wherein one side of each auxiliary mounting table is fixed to the main mounting table and a portion of the auxiliary mounting table, which is fixed to the main mounting table, is supported by the main mounting table, and a portion of the auxiliary mounting table opposed to the portion of the auxiliary mounting table, which is fixed to the main mounting table, is unsupported by the main mounting table.

5 more elements

Dependencies are inferred from the claim text.

Facts

Application: 12/902,496Filed 12 Oct 2010 · continuation
Priority: JP 2008-13100419 May 2008
Published: US 2011/0042876 A124 Feb 2011
Granted: 22 Jul 2014
Term ends: Not estimatedThe source records don’t support an estimate.

Classification5 codes

B25B 1/00
Vices
B65G 49/061
For fragile sheets, e.g. glass: lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction…
B65G 2249/02
Aspects relating to conveying systems for the manufacture of fragile sheets: controlled or contamination-free environments or clean space conditions
B25B
Tools or bench devices not otherwise provided for, for fastening, connecting, disengaging

Family

PCT/JP2009/058910Parent of this continuation · filed 13 May 2009
US 2011/0042876 A1Pre-grant publication · published 24 Feb 2011
US 8,783,674 B2This patent

From the US filing history. Foreign family members aren’t listed.

Timeline

Citations

Open elsewhere

Building an agent or pulling many patents? Use the API or MCP server instead of scraping pages. Get an API key