US 8,783,673 B2Granted

Workpiece carrier device

AssigneeOerlikon Trading AG, Trubbach

InventorsStefan Esser, Martin Zaech

Life of this patent

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Abstract

A workpiece carrier has a base frame, a shaft surrounding a drive axis and a workpiece carrier and includes a rotary frame mounted on the base frame so as to be rotatable about the drive axis, workpiece holders mounted on the rotary frame so as to be rotatable about holding axes, a driving part with a holder mounted so as to be rotatable about the drive axis, a transmission part operationally connected to the rotatably mounted workpiece holders, and an intermediate gear attached to the rotatably mounted holder. The intermediate gear is connected to the shaft and to the transmission part in such a way that the transmission part engages with the driving part so as to be rotatable about an output point that is spaced apart from the drive axis by an eccentricity.

Claims2

Dependent claims

A workpiece carrier device having a base frame (1), a shaft (20) surrounding a drive axis (4), and a workpiece carrier (2), the workpiece carrier (2) comprising:

a rotary frame (3) mounted on the base frame (1) so as to be rotatable about the drive axis (4),
workpiece holders (13) mounted on the rotary frame (3) so as to be rotatable about holding axes,
a driving part (22) with a holder mounted so as to be rotatable about the shaft (20),
a transmission part (26) operationally connected to the rotatably mounted workpiece holders (13), and
an intermediate gear attached to the rotatably mounted holder, the intermediate gear being operationally connected to the shaft (20) and the transmission part (26) in such a way that the transmission part (26) engages with the driving part (22) so as to be rotatable about an output point (29) that is spaced apart from the drive axis (4) by an eccentricity (E).

2 more elements

Dependencies are inferred from the claim text.

Facts

Application: 14/018,118Filed 4 Sep 2013 · continuation
Priority: EP 074053028 Oct 2007
Published: US 2014/0008857 A19 Jan 2014
Granted: 22 Jul 2014
Term ends: Not estimatedThe source records don’t support an estimate.

Classification7 codes

B23Q 1/64
Movable or adjustable work or tool supports: characterised by the purpose of the movement
C23C 14/505
Substrate holders: for rotation of the substrates
C23C 16/458
Characterised by the method of coating: characterised by the method used for supporting substrates in the reaction chamber
F16H 21/14
For conveying rotary motion: by means of cranks, eccentrics, or like members fixed to one rotary member and guided along tracks on the other

Family

PCT/EP2008/008349Parent of this continuation · filed 2 Oct 2008
US 2014/0008857 A1Pre-grant publication · published 9 Jan 2014
Application12/681,833Parent of this continuation
US 8,596,626 B2Parent of this continuation
US 2010/0270722 A1Published application
US 8,783,673 B2This patent

From the US filing history. Foreign family members aren’t listed.

Timeline

Citations

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