MEMS dynamic pressure sensor, in particular for applications to microphone production

A pressure sensor of the MEMS and/or NEMS type, comprising:

• at least one first deformable cavity configured to receive pressure variations from an ambient atmosphere, this first deformable cavity being made in at least a first planar layer extending in a sensor plane of the pressure sensor, and including at least one movable wall which is movable only along said sensor plane, wherein pressure variations are transmitted from an ambient atmosphere to said cavity;
• at least one detector having a stationary part provided in at least said sensor plane and being stationary relative to said movable wall, the at least one detector being configured to detect a displacement of the movable wall in the sensor plane under the effect of a pressure variation of the ambient atmosphere;
• and
• at least one secondary cavity, partially in communication with the first deformable cavity, said secondary cavity forming a reference cavity, wherein the secondary cavity is separated from the first cavity at least partially by the at least one movable wall, and the displacement of the movable wall takes place under the effect of a pressure difference between pressures in the first deformable cavity and the secondary cavity.