Conductive element for electrically coupling an EUVL mask to a supporting chuck

A coupling module for coupling an extreme ultra violet (EUVL) mask to a chuck, the coupling module comprising:

• an upper portion that defines an aperture;
• at least one mask contact element;
• chuck contact elements;
• and
• an intermediate element connected between the mask contact elements and the upper portion;
• wherein a shape and a size of the aperture corresponds to a shape and size of a pattern transfer area of the EUVL mask;
• wherein the coupling module is shaped and sized so that once the at least one mask contact element contacts an upper portion of the EUVL mask, the chuck contact elements contact a chuck that supports the EUVL mask;
• and
• wherein the coupling module provides at least one conductive path between the upper portion of the EUVL mask and the chuck, when the EUVL mask is positioned on the chuck in alignment with the coupling module.