Scanning charged particle beam device and method for correcting chromatic spherical combination aberration

A scanning charged particle beam apparatus making use of a charged particle beam comprising:

• a specimen stage on which a specimen is mounted;
• an irradiation optical system that scans a primary charged particle beam over a specimen mounted on the specimen stage;
• a detector that detects secondary charged particles generated from the specimen by scanning the primary charged particle beam;
• a display unit that displays an image from output signals of the detector;
• a controller that controls the specimen stage, the irradiation optical system, the detector, and the display unit;
• and
• a storage unit connected to the controller,
• wherein:
• the irradiation optical system comprises an aberration corrector that corrects an aberration of the incoming primary charged particle beam and a deflector that is disposed above the aberration corrector that deflects the primary charged particle beam;
• and
• the controller stores, into the storage unit, a chromatic third-order aperture aberration quantity measured by control of changing the angle and direction of irradiation of the primary charged particle beam onto the specimen by means of the deflector and changing an accelerating voltage for the primary charged particle beam.