Method for manufacturing semiconductor chips from a semiconductor wafer
AssigneeSTMicroelectronics (Tours) SAS
InventorsVincent Jarry, Patrick Hougron, Dominique Touzet, José Mendez
Life of this patent
Estimating the term…
Loading patent…
AssigneeSTMicroelectronics (Tours) SAS
InventorsVincent Jarry, Patrick Hougron, Dominique Touzet, José Mendez
Estimating the term…
A method for manufacturing semiconductor chips from a semiconductor wafer, including the steps of: fastening, on a first support frame, a second support frame having outer dimensions smaller than the outer dimensions of the first frame and greater than the inner dimensions of the first frame; arranging the wafer on a surface of a film stretched on the second frame; carrying out wafer processing operations by using equipment capable of receiving the first frame; separating the second frame from the first frame and removing the first frame; and carrying out wafer processing operations by using equipment capable of receiving the second frame.
A method for processing a semiconductor wafer, comprising:
A support frame comprising:
Dependencies are inferred from the claim text.