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US 8,772,124 B2Granted
Full wafer processing by multiple passes through a combinatorial reactor
AssigneeIntermolecular, Inc.
InventorsRajesh Kelekar, Aaron T Francis, Gregory P Lim
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Abstract
Overlapping combinatorial processing can offer more processed regions, better particle performance and simpler process equipment. In overlapping combinatorial processing, one or more regions are processed in series with some degrees of overlapping between regions. In some embodiments, overlapping combinatorial processing can be used in conjunction with non-overlapping combinatorial processing and non-combinatorial processing to develop and investigate materials and processes for device processing and manufacturing.
Claims6
A method comprising:
- processing a substrate through multiple processing steps in sequential manner;
- wherein each processing step processes a plurality of site isolated regions on a surface of the substrate in a combinatorial manner;
- and
- wherein there is no overlap between the site isolated regions processed in a first processing step and there is significant overlap between the site isolated regions processed in a second processing step and the site isolated regions processed in the first processing step.
1 more element
Dependencies are inferred from the claim text.