Method for fabricating semiconductor device

A method for fabricating a semiconductor device, the method comprising:

• sequentially forming a first insulating film and a first barrier layer on a first surface of an n+ type substrate;
• etching the first barrier layer to form a first barrier layer pattern;
• etching the first insulating film by using the first barrier layer pattern as a mask to form a first insulating film pattern to thereby expose a first portion of a first surface of the n+ type silicon carbide substrate;
• removing the first barrier layer pattern and then forming a first type of epitaxial layer by a first epitaxial growth on the exposed first portion of the first surface of the n+ type silicon carbide substrate;
• sequentially forming a second insulating film and a second barrier layer on the first type of epitaxial layer and the first insulating film pattern;
• etching the second barrier layer to form a second barrier layer pattern;
• etching the second insulating film by using the second barrier layer pattern as a mask to form a second insulating film pattern, and etching the first insulating film pattern by using the second barrier layer pattern as a mask to expose a second portion of the first surface of the n+ type silicon carbide substrate;
• and
• forming a second type of epitaxial layer by a second epitaxial growth on the exposed second portion of the first surface of the n+ type silicon carbide substrate,
• wherein the first portion of the first surface of the n+ type silicon carbide substrate and the second portion of the first surface of the n+ type silicon carbide substrate are adjacent to each other.