Transport conduits for contacts to graphene
AssigneeInternational Business Machines Corporation
InventorsChristos D. Dimitrakopoulos, Aaron D. Franklin, Joshua T. Smith
Life of this patent
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AssigneeInternational Business Machines Corporation
InventorsChristos D. Dimitrakopoulos, Aaron D. Franklin, Joshua T. Smith
Estimating the term…
An apparatus comprises at least one transistor. The at least one transistor comprises a substrate, a graphene layer formed on the substrate, and first and second source/drain regions spaced apart relative to one another on the substrate. The graphene layer comprises at least a first portion and a second portion, the first portion being in contact with the first source/drain region and the second portion being in contact with the second source/drain region. One or more cuts are formed in at least one of the first and second portions of the graphene layer. The apparatus allows for lowered contact resistance in graphene/metal contacts.
A method comprising:
A method, comprising:
Dependencies are inferred from the claim text.