Methods of forming metal oxide nanostructures, and nanostructures thereof
AssigneeInternational Business Machines Corporation
InventorsHo-Cheol Kim, Robert D. Miller, Oun Ho Park
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AssigneeInternational Business Machines Corporation
InventorsHo-Cheol Kim, Robert D. Miller, Oun Ho Park
Estimating the term…
A method of forming a metal oxide nanostructure comprises disposing a chelated oligomeric metal oxide precursor on a solvent-soluble template to form a first structure comprising a deformable chelated oligomeric metal oxide precursor layer; setting the deformable chelated oligomeric metal oxide precursor layer to form a second structure comprising a set metal oxide precursor layer; dissolving the solvent-soluble template with a solvent to form a third structure comprising the set metal oxide precursor layer; and thermally treating the third structure to form the metal oxide nanostructure.
A substrate comprising a free-standing three dimensional chelated oligomeric metal oxide precursor bonded to the substrate, wherein the free-standing three dimensional chelated oligomeric metal oxide precursor is a non-sol-gel type, and the substrate is solvent soluble, wherein the free-standing three dimensional chelated oligomeric metal oxide precursor is of the formula:
Dependencies are inferred from the claim text.