Combinatorial process system

A combinatorial processing chamber, comprising:

• a plurality of process heads operable to deposit a layer of material onto a substrate, the plurality of process heads clustered around a first axis, the plurality of process heads coupled to a rotatable assembly operable to rotate around a second axis;
• a rotatable substrate support operable to rotate around a center axis and an off center axis;
• a base plate located above the rotatable substrate support to allow a substrate to reside on the rotatable substrate support without the base plate contacting the substrate, the base plate having a single fixed opening for exposing a portion of the rotatable substrate support to one or more of the plurality of process heads;
• and
• a moveable plate having a fixed aperture exposing a portion of the fixed opening, the moveable plate slidably located within a recess of the base plate.