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US 8,770,965 B2Granted
Device and method for transferring micro structure
AssigneeHitachi High-Technologies Corporation
InventorsRyuta Washiya, Masahiko Ogino, Noritake Shizawa, Kyoichi Mori, Akihiro Miyauchi
Life of this patent
Estimating the term…
Abstract
A microstructure transferring device is characterized in that the device comprises a stamper made from a first photo-curable resin composition cured with light with a first wavelength, and a light source emitting light with a second wavelength longer than the first wavelength. The microstructure is transferred to an impression receptor supplied with a second photo-curable resin composition, which is curable with light with the second wavelength emitted by the light source.
Claims17
A microstructure transferring device for transferring a microstructure to a photo-curable resin composition supplied to an impression receptor comprising:
- a stamper having the microstructure configured to be pressed against a second photo-curable resin composition applied to the impression receptor and removed from the supplied second photo-curable resin composition after cured;
- a light source emitting a second wavelength light, whose wavelength is longer than a first wavelength, the second wavelength light being capable of curing the second photo-curable resin composition, and being configured to pass through the stamper to the second photo-curable resin composition while the stamper is being pressed against the second photo-curable resin composition supplied to the impression receptor in order to cure the supplied second photo-curable resin composition;
- a pressing member configured to press the stamper against the second photo-curable resin composition supplied to the impression receptor;
- and
- an optical filter, which is disposed at the pressing member, and which absorbs light with a range of wavelengths shorter than the second wavelength,
- wherein the light source is configured to expose the second photo-curable resin composition supplied to the impression receptor to light passing through the optical filter before reaching the second photo-curable resin composition, and
- wherein
- the stamper is formed by pressing, against a first photo-curable resin composition, a master stamper having the microstructure, by curing the first photo-curable resin composition by exposing the first photo-curable resin composition to light with the first wavelength, and by removing the master stamper from the cured first photo-curable resin composition.
5 more elements
A microstructure transferring system comprising:
- a first microstructure transferring device for producing a stamper, including:
- a master stamper having a microstructure configured to be pressed against a first photo-curable resin composition and removed from the first photo-curable resin composition after the first photo-curable resin composition is cured,
- a first light source emitting a first light of a first wavelength to cure the first photo-curable resin composition;
- and
- a second microstructure transferring device configured to transfer the microstructure to a second photo-curable resin composition applied to an impression receptor including:
- the stamper configured to be pressed against the second photo-curable resin composition applied to the impression receptor and removed from the applied second photo-curable resin composition after the applied second photo-curable resin composition is cured;
- a second light source emitting a second light of a second wavelength being longer than the first wavelength, the second light being capable of curing the second photo-curable resin composition, and being configured to pass through the stamper to the second photo-curable resin composition while the stamper is being pressed against the second photo-curable resin composition applied to the impression receptor in order to cure the applied second photo-curable resin composition;
- a pressing member configured to press the stamper against the second photo-curable resin composition applied to the impression receptor;
- and
- an optical filter provided on the pressing member, the optical filter absorbing light with a range of wavelengths shorter than the second wavelength, and being configured so that the second light passes through the optical filter before reaching the second photo-curable resin composition applied to the impression receptor.
7 more elements
A microstructure transferring system comprising:
- a first microstructure transferring device for producing a stamper, including
- a master stamper having a microstructure configured to be pressed against a first photo-curable resin composition and removed from the first photo-curable resin composition after the first photo-curable resin composition is cured,
- a first light source emitting a first light of a first wavelength to cure the first photo-curable resin composition;
- and
- a second microstructure transferring device configured to transfer the microstructure to a second photo-curable resin composition applied to each of two sides of an impression receptor, including:
- a pair of the stampers each configured to be pressed against the second photo-curable resin composition applied to each of the two sides of the impression receptor, and being removed from the applied second photo-curable resin composition after the applied second photo-curable resin composition is cured;
- a pair of second light sources each emitting a second light of a second wavelength being longer than the first wavelength, the second light being capable of curing the second photo-curable resin composition, and passing through the stamper to the second photo-curable resin composition while each of the stampers is being pressed against the second photo-curable resin composition applied to each of the two sides of the impression receptor in order to cure the applied second photo-curable resin composition;
- a pair of pressing members each configured to press the stamper against the second photo-curable resin composition applied to the impression receptor;
- and
- a pair of optical filters each provided on the pressing member, and each of the optical filter absorbing light with a range of wavelengths shorter than the second wavelength, and being configured so that the second light passes through the optical filter before reaching the second photo-curable resin composition applied to the impression receptor.
7 more elements
Dependencies are inferred from the claim text.